Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7111523 | Diamond and Related Materials | 2013 | 8 Pages |
Abstract
The formation of phases within the interlayer during nitridation and the diamond CVD process, and diamond quality evaluation in the deposited films were investigated by complementary techniques: SEM, XRD, XPS, SIMS and Raman spectroscopy.
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
E. Hojman, R. Akhvlediani, A. Layyous, A. Hoffman,