| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7111586 | Diamond and Related Materials | 2012 | 5 Pages |
Abstract
âºDiamond films are prepared in a 10 kW, 2450 MHz MPCVD with multi-mode chamber. âºTM01 and TM02 are overlapped around the substrate to generate large scale plasma ball. âºCone-shaped antenna introduces the microwave energy into chamber. âºThe temperature variation is decreased obviously when substrate holder is improved. âºDiamond films (Φ = 80 mm) are obtained with high uniformity of morphology and quality.
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
J. Weng, L.W. Xiong, J.H. Wang, S.Y. Dai, W.D. Man, F. Liu,