Article ID Journal Published Year Pages File Type
7111610 Diamond and Related Materials 2012 5 Pages PDF
Abstract
► Fluorination of a-C:H films was achieved by CF4 plasma treatment. ► LEIS was used for the characterization of the outermost surface layer. ► AFM measurements show an increase of the surface roughness for longer time treatment. ► The fluorine content at the outermost surface layer explains the surface hydrophobicity.
Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
Authors
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