Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7111610 | Diamond and Related Materials | 2012 | 5 Pages |
Abstract
⺠Fluorination of a-C:H films was achieved by CF4 plasma treatment. ⺠LEIS was used for the characterization of the outermost surface layer. ⺠AFM measurements show an increase of the surface roughness for longer time treatment. ⺠The fluorine content at the outermost surface layer explains the surface hydrophobicity.
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Authors
M.E.H. Maia da Costa, F.L. Jr.,