| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7111641 | Diamond and Related Materials | 2012 | 4 Pages |
Abstract
⺠Study of the propagtion of first symmetric Lamb wave mode S0 in AlN/Diamond membrane. ⺠The piezoelectric coupling coefficient up to 4.5% over a wide frequency range. ⺠The AlN/SiO2/Diamond membrane provides efficient temperature compensation in HF range.
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Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
A. Talbi, A. Soltani, V. Mortet, J.-C. Gerbedoen, J.-C. De Jaeger, P. Pernod,