Article ID Journal Published Year Pages File Type
7111657 Diamond and Related Materials 2012 4 Pages PDF
Abstract
► We study in this work the erosion of heat treated a-C:H under atomic H bombardment. ► We present a fast way to determine the erosion rate & absorption coefficient of a-C:H films using Raman. ► Our model is based on relative Raman band intensities and the Beer's absorption law. ► We controlled our results using ellipsometry measurements. ► Our work can be used in a systematic study aiming at better understanding chemical erosion.
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Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
Preview
Raman micro-spectroscopy as a tool to measure the absorption coefficient and the erosion rate of hydrogenated amorphous carbon films heat-treated under hydrogen bombardment
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