| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7111663 | Diamond and Related Materials | 2012 | 8 Pages |
Abstract
⺠We measured residual stresses by Raman spectroscopy in thin diamond coatings. ⺠Measurements were made on samples with and without a DLC interlayer. ⺠We showed the interest of using a DLC interlayer to lower the residual stresses. ⺠We validate the use of the TMCVD technique to lower the residual stresses. ⺠A qualitative evaluation of the quality and surface roughness of samples was made.
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Authors
Z. Nibennanoune, D. George, F. Antoni, S. Ahzi, D. Ruch, J. Gracio, Y. Remond,