Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7133266 | Sensors and Actuators A: Physical | 2018 | 6 Pages |
Abstract
This paper proposes an optical method for measuring small displacements using high-angular-sensitivity total-internal-reflection (TIR) heterodyne interferometry. In the designed system, a half-wave plate and a quarter-wave plate that display specific optic-axis azimuths are combined to form a phase shifter. When an isosceles right-angle prism is placed between the phase shifter and an analyzer that displays suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p- polarization states at one TIR. The enhanced phase difference is a function of the prism incident angle, whose variation depends on the displacement of a target; therefore the displacement can be easily and precisely measured by estimating the phase-difference variation. The feasibility of our method was demonstrated with measurement resolution and sensitivity levels superior to 0.025â¯Î¼m and 4.0°/μm, respectively in a measurement range of 10â¯Î¼m.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Jiun-You Lin, Xuan-Wei Lee, Meng-Chang Hsieh, Chia-Ou Chang,