| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7133272 | Sensors and Actuators A: Physical | 2018 | 7 Pages |
Abstract
Thermal treatments have been performed in order to enhance the device thermal and electrical performances repeatability on wafer.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Maria Eloisa Castagna, Roberto Modica, Salvatore Cascino, Maurizio Moschetti, Viviana Cerantonio, Alberto Messina, Antonello Santangelo,