Direct inference of parameters for piezoresistive micromechanical resonators embedded in feedthrough

► Method/approach to directly infer all the parameters for a piezoresistive resonator that is heavily embedded in parasitic capacitive feedthrough. ► Such capability is being demonstrated for the first time. ► Given its efficiency for parameter extraction/estimation, this paper demonstrates that differences with more detailed extraction procedures are within 5% ► Limits of this approach when feedthrough is extremely large are highlighted within. ► Given the interest in MEMS resonators which are basic components in many MEMS applications and the use of the piezoresistive effect for enhanced characterization, the proposed tool will be of much interest.