Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7140456 | Sensors and Actuators B: Chemical | 2018 | 7 Pages |
Abstract
The mixed-potential-type NO2 sensor based on a yttria-stabilized zirconia (YSZ) electrolyte with NiO sensing electrode and a three-phase boundary (TPB) was fabricated. The ion beam etching (IBE) technology with low energy was employed to etch the YSZ substrate for the first time. The characterization result indicates that the YSZ substrate prepared by argon ion (Ar+) beam with different incident angles (10° and 40°) obtains hollow and spike patterns on the surface, respectively. The sensing performance was improved by the self-organized nanostructures of TPB, which enhances the contact area obviously. The sensor using a YSZ substrate processed by 10° incident angle with 800â¯eV/60â¯mA energy demonstrates the largest response compared with other parameters to NO2 at 850â¯Â°C. Sensitivity of the sensors is achieved as 40.7â¯mV/decade, about 1.9 times as the initial YSZ substrate. In addition, the sensor also has good response-recovery transients, repeatability and selectivity.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Rui You, Xidong Hao, Hongyan Yu, Baoxu Wang, Geyu Lu, Fangmeng Liu, Tianhong Cui,