| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7141880 | Sensors and Actuators B: Chemical | 2018 | 8 Pages |
Abstract
An aluminum-doped zinc oxide (AZO) thin-film-based formaldehyde sensor prepared using radio-frequency sputtering (RF) is studied. The proposed device has a very high formaldehyde sensing response of 95.5 (@20 ppm HCHO/air, 350 °C), an extremely low detection limit (â¤40 ppb HCHO/air), a relatively low operating temperature (â¤350 °C), and a wide sensing range. Moreover, the device has a simple structure and is easily fabricated, low cost, and environmentally friendly. Therefore, the proposed AZO thin-film-based sensor is promising for high-performance formaldehyde sensing applications.
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Authors
Cheng-Yu Chi, Huey-Ing Chen, Wei-Cheng Chen, Ching-Hong Chang, Wen-Chau Liu,