Article ID Journal Published Year Pages File Type
7146238 Sensors and Actuators B: Chemical 2015 10 Pages PDF
Abstract

- Microwave heating was used to optimize the silanization and passivation of the silicon oxide surface.
- It is demonstrated that a uniform APTES monolayer coating reduces the pH response of the silicon oxide-gated SiNR FET while a partial coverage of the surface leads to increased pH response.
- The APTES monolayer reduces cation adsorption to the oxide surface of the SiNR FET.
Related Topics
Physical Sciences and Engineering Chemistry Analytical Chemistry
Authors
, , , , , ,