Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7146763 | Sensors and Actuators B: Chemical | 2014 | 10 Pages |
Abstract
- Ozone flexible sensors were fabricated by photolithography and by laser ablation processes on Kapton substrate.
- The sensors were fabricated under the same conditions, and their physical, electrical and sensitive properties were studied and compared.
- ZnO nanoparticles thin film deposited by drop coating was used as sensitive material.
- Operational temperature for ozone detection at 200 °C.
- Photolithography and laser ablation samples presented a wide range of ozone detection with good reproducibility and fast response/recovery.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
M. Acuautla, S. Bernardini, L. Gallais, T. Fiorido, L. Patout, M. Bendahan,