Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7147092 | Sensors and Actuators B: Chemical | 2014 | 9 Pages |
Abstract
The gallium oxide (β-Ga2O3) thin films were deposited onto a quartz substrate using spray pyrolysis technique with gallium acetylacetonate as precursor salt. The X-ray diffraction pattern of the annealed film at 900 °C indicated the formation of monoclinic β-Ga2O3 phase with polycrystalline nature. Field emission scanning electron micrograph showed nanocrystallites over the film surface. The ammonia sensing property of the film at room temperature (â¼30 °C) was studied by chemiresistive method. Influencing factors such as vapour concentration, relative humidity and film thickness in ammonia sensing performance were studied and reported.
Related Topics
Physical Sciences and Engineering
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Analytical Chemistry
Authors
R. Pandeeswari, B.G. Jeyaprakash,