| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7148824 | Sensors and Actuators B: Chemical | 2013 | 6 Pages |
Abstract
A microhydrogen gas sensor platform was fabricated by a MEMS process. A nano-bumpy structure was produced using a polystyrene aqueous suspension to develop the surface areas of the sensing area (palladium thin film). The palladium film was deposited on a fabricated platform by a radio frequency magnetron sputtering. A cross section of each AFM image was analyzed to determine the mean surface roughness. The root-mean square roughness of the 1-layer nano-bumpy Pd structure and 2-layers nano-bumpy Pd structure were 9.07Â nm and 13.1Â nm, respectively, whereas that of the Pd thin film was 0.98Â nm. The sensitivities of the Pd thin film sensor, mono-layer nano-bumpy sensor and double-layers nano-bumpy sensor at hydrogen gas concentrations of 2000Â ppm was 0.638%, 1.045% and 1.511%, respectively.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Jin-Ho Yoon, Bum-Joon Kim, Jung-Sik Kim,