Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7150958 | Solid-State Electronics | 2016 | 5 Pages |
Abstract
Difference thermal conductivity and resistivity resulted in covered SiNx crack on Cu line, voids in Al line. Power-law dependency of ÎVt indicates defect states creation.353
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Ching-Yuan Ho, Yaw-Jen Chang,