Article ID Journal Published Year Pages File Type
735012 Optics and Lasers in Engineering 2016 8 Pages PDF
Abstract

•New 13-sample phase-shifting algorithm is proposed.•The characteristics of 13-sample algorithm is estimated in the frequency domain.•The phase error of 13-sample algorithm is compared with those of other algorithms.•Surface shape is measured by wavelength tuning and 13-sample algorithm.

When measuring the surface shape of a transparent sample using wavelength-tuning Fizeau interferometry, the calculated phase is critically determined by not only phase-shift errors, but also by coupling errors between higher harmonics and phase-shift errors. This paper presents the derivation of a 13-sample phase-shifting algorithm that can compensate for miscalibration and first-order nonlinearity of phase shift, coupling errors, and bias modulation of the intensity, and has strong suppression of the second reflective harmonic effect. The characteristics of the 13-sample algorithm are estimated with respect to Fourier representation in the frequency domain. The phase error of measurement performed using the 13-sample algorithm is discussed and compared with those of measurements obtained using other conventional phase-shifting algorithms. Finally, the surface shape of a fused silica wedge plate obtained using a wavelength tuning Fizeau interferometer and the 13-sample algorithm are presented. The experimental results indicate that the surface shape measurement accuracy for a transparent fused silica plate is 3 nm. The accuracy of the measurement is discussed by comparing the amplitudes of the crosstalk noise calculated using other conventional algorithms.

Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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