Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
736489 | Sensors and Actuators A: Physical | 2016 | 4 Pages |
Abstract
•Photonic detection and actuation of micromechanical beams achieved with a DVD OPU.•Small micromechanical sensors successfully detected and actuated.•Operation in air and liquid demonstrated.
We report simple and low-cost setup based on a modified DVD optical pickup unit for detection and photothermal actuation of microcantilever oscillations. Small rectangular cantilevers (length 7 μm, width 3 μm and thickness 100 nm) were successfully actuated and detected in both air and liquid environments. Applications of such a setup for microcantilever-based biochemical and physical sensors and in atomic force microscopy are envisaged.
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Authors
Artūras Ulčinas, Loren M. Picco, Monica Berry, J.K. Heinrich Hörber, Mervyn J. Miles,