Article ID Journal Published Year Pages File Type
736489 Sensors and Actuators A: Physical 2016 4 Pages PDF
Abstract

•Photonic detection and actuation of micromechanical beams achieved with a DVD OPU.•Small micromechanical sensors successfully detected and actuated.•Operation in air and liquid demonstrated.

We report simple and low-cost setup based on a modified DVD optical pickup unit for detection and photothermal actuation of microcantilever oscillations. Small rectangular cantilevers (length 7 μm, width 3 μm and thickness 100 nm) were successfully actuated and detected in both air and liquid environments. Applications of such a setup for microcantilever-based biochemical and physical sensors and in atomic force microscopy are envisaged.

Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
Authors
, , , , ,