| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 737330 | Sensors and Actuators A: Physical | 2013 | 8 Pages |
Abstract
High-speed gap measurement in the nano/micrometer range presents unique engineering challenges. A signal conditioner is required for capacitive sensors to amplify, denoise, and restrict the bandwidth. In this work, a capacitive sensor was used in combination with a SAW device that serves as a signal conditioner. The proposed system provides 2.75 MHz bandwidth through amplitude modulation using the center frequency of the SAW device as a carrier signal and has outstanding signal conditioning capabilities. Construction and characterization of a SAW-based capacitive gap sensor to measure a 200 Hz gap frequency are described.
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Authors
J.-G. Kim, T.-J. Lee, N.-C. Park, Y.-P. Park, K.-S. Park,