Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
740833 | Sensors and Actuators B: Chemical | 2011 | 7 Pages |
Abstract
Room temperature detection of CO2 using metal–insulator–silicon (MIS) devices is reported. These devices comprise atomic layer deposited La2O3 thin films as the gas-sensitive dielectric layer and Pt, Pt/Ta and Al as the electrodes. Physical mechanisms that lead to the detection of CO2 at room temperature are discussed.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
K.B. Jinesh, V.A.T. Dam, J. Swerts, C. de Nooijer, S. van Elshocht, S.H. Brongersma, M. Crego-Calama,