Article ID Journal Published Year Pages File Type
741104 Sensors and Actuators B: Chemical 2009 5 Pages PDF
Abstract

Grated silicon photonic wires for refractometric applications have been fabricated using a 248-nm deep UV lithography. It is shown experimentally, that a device with length of only 180 μm has an index sensitivity of 10−6 assuming a detector power resolution of 1%. It is also demonstrated that the device is suitable to monitor index changes in a liquid cladding, which could be used to monitor on chip chemical reactions.

Related Topics
Physical Sciences and Engineering Chemistry Analytical Chemistry
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