Article ID Journal Published Year Pages File Type
741486 Sensors and Actuators B: Chemical 2008 5 Pages PDF
Abstract

The electrical response of a hydrogen-sensing device is either a rectifying diode-type or a capacitor-type but could not be operated simultaneously in both the modes. However, we are able to demonstrate that a Pd/AlN/SiC device can operate in dual mode either as a rectifying diode or a capacitor. The device with a 50 nm AlN layer shows a shift of ∼0.35 V for 100 ppm H2 in both the modes, at a temperature of 150 °C. It seems that the presence of donor levels in the bandgap of the AlN layer with a wide range of energy is responsible for the observed electrical behavior of this device.

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Physical Sciences and Engineering Chemistry Analytical Chemistry
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