| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 741658 | Sensors and Actuators B: Chemical | 2007 | 8 Pages |
Abstract
MEMS micro heater devices capable of long-term operation at temperatures up to 1000 °C are presented. The enhanced long-term stability has been achieved by employing antimony-doped tin oxide (SnO2:Sb) as a substitute for the conventionally used noble metal heater resistors. A detailed investigation of its high-temperature stability reveals that degradation is caused by out-diffusion of Sb impurities from the SnO2 film.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
J. Spannhake, A. Helwig, G. Müller, G. Faglia, G. Sberveglieri, T. Doll, T. Wassner, M. Eickhoff,