| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 743070 | Sensors and Actuators B: Chemical | 2013 | 6 Pages |
Abstract
Rugate-structured free-standing porous silicon was used as a membrane for a fiber-optic sensor. This material was suitable as a pressure sensitive membrane because it showed a strong peak in the reflectance spectrum which can be used for sensor signal processing and because its elasticity modulus could be easily controlled. The membranes showed an effective response in a low pressure range between 0.0 and −20.0 kPa. In addition, the membranes showed multiple responses to organic gases as well as different pressures due to their gas-sensing capability imparted by their highly porous structure.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
So-Yeon Cho, Ki-Won Lee, Jae-Wan Kim, Dong-Hyun Kim,