| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 743477 | Sensors and Actuators B: Chemical | 2009 | 5 Pages |
Abstract
A strontium titanate (SrTiO3) thin film showed high oxygen sensitivity on the ppb order at room temperature. The sensitivity is enough to monitor oxygen contamination in semiconductor manufacturing processes, which is becoming increasingly important as semiconductor devices are scaled down to the nanometer generation. The SrTiO3 film was prepared using atomic layer deposition (ALD), which has been established and found suitable for mass production.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Toru Hara, Takashi Ishiguro,