Fabrication of undoped-TiO2 nanostructure-based NO2 high temperature gas sensor using low frequency AC electrophoretic deposition method

TiO2 was deposited on patterned alumina substrates through low frequency AC electrophoresis deposition (LFACEPD) as sensing material for NO2 sensing. The deposition pattern was visualized using optical microscopy and SEM and was characterized by XRD. The fabricated gas sensor was tested in dilute NO2 gas with different concentrations in the temperature range of 450–550 °C. Results indicate that using LFACEPD technique for deposition of sensing layer, TiO2 nanomaterial – in its undoped state-can present adequate sensitivity to NO2 even in its pure form.