Article ID Journal Published Year Pages File Type
744275 Sensors and Actuators B: Chemical 2008 6 Pages PDF
Abstract

This work presents the design, fabrication and characterization of a Si-based microseparation module for liquid chromatography (LC), targeted for agrofood applications and in particular for wine quality monitoring. The microsystem chip is a Silicon/Pyrex structure realized by anodic bonding. The basic Si-chip modules are an open tubular microcolumn with inlet/outlet for fluidic connections, a platinum heater and a Pt three-electrode amperometric sensor. Analytical calculations and finite element analysis have been performed to optimize the microcolumn design. Microchannels and inlet/outlet have been fabricated by deep reactive ion etching (DRIE) and tetra methyl ammonium hydroxide (TMAH) wet etching, respectively. The column has been functionalized with n-octyltriethoxysilane (C8-TEOS). Preliminary characterization tests of the microcolumn have been performed by evaluating the capability of the system to retain test solutions of acetic acid.

Related Topics
Physical Sciences and Engineering Chemistry Analytical Chemistry
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