| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 745121 | Sensors and Actuators B: Chemical | 2006 | 7 Pages |
Abstract
InOx thin films were grown by dc magnetron sputtering. Structural and morphological investigations carried out by XRD and AFM showed a strong correlation between crystallinity, surface topology and ozone sensitivity. The electrical conductivity exhibited a large change of six orders of magnitude during the processes of photoreduction/oxidation. It was concluded that it is mainly the grain size variation that determines the sensitivity of InOx films against ozone.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
M. Suchea, N. Katsarakis, S. Christoulakis, S. Nikolopoulou, G. Kiriakidis,