Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
745139 | Sensors and Actuators B: Chemical | 2006 | 8 Pages |
Abstract
The gas sensing properties of WO3 thin films deposited on highly ordered nanoporous alumina templates were studied. WO3 films were prepared by rf sputtering of a tungsten target in a mixture of Ar and O2. The WO3-based sensors were selective to NO2, NH3 and ethanol at the temperature range from 150 to 300 °C. A mechanism of the influence of the nanoporous template on the response of the sensing film is discussed.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Viacheslav Khatko, Gennadii Gorokh, Alexander Mozalev, Dmitry Solovei, Eduard Llobet, Xavier Vilanova, Xavier Correig,