Article ID Journal Published Year Pages File Type
745139 Sensors and Actuators B: Chemical 2006 8 Pages PDF
Abstract

The gas sensing properties of WO3 thin films deposited on highly ordered nanoporous alumina templates were studied. WO3 films were prepared by rf sputtering of a tungsten target in a mixture of Ar and O2. The WO3-based sensors were selective to NO2, NH3 and ethanol at the temperature range from 150 to 300 °C. A mechanism of the influence of the nanoporous template on the response of the sensing film is discussed.

Related Topics
Physical Sciences and Engineering Chemistry Analytical Chemistry
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