Article ID Journal Published Year Pages File Type
745144 Sensors and Actuators B: Chemical 2006 5 Pages PDF
Abstract

The current trend in increasing microcantilever resonant frequencies leads to relatively low quality factors for microcantilevers resonating in a gas medium. In order to increase the quality factor of such high-frequency microcantilevers, an approach that takes into account the different types of losses is provided to specify appropriate values of microcantilever aspect ratios (length to thickness, width to thickness). Conventional values of aspect ratios result in low quality factors, while those proposed here lead to slightly higher values of quality factor.

Related Topics
Physical Sciences and Engineering Chemistry Analytical Chemistry
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