Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
745144 | Sensors and Actuators B: Chemical | 2006 | 5 Pages |
Abstract
The current trend in increasing microcantilever resonant frequencies leads to relatively low quality factors for microcantilevers resonating in a gas medium. In order to increase the quality factor of such high-frequency microcantilevers, an approach that takes into account the different types of losses is provided to specify appropriate values of microcantilever aspect ratios (length to thickness, width to thickness). Conventional values of aspect ratios result in low quality factors, while those proposed here lead to slightly higher values of quality factor.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Frédéric Lochon, Isabelle Dufour, Dominique Rebière,