Article ID Journal Published Year Pages File Type
745152 Sensors and Actuators B: Chemical 2006 5 Pages PDF
Abstract

Electrostatic ion shutters are a key component in ion mobility spectrometry technology. Ion mobility spectrometry instruments may be miniaturized by using MEMS components. In this paper we present an ion shutter made in bulk silicon micromachining. An optimization of the shutter design is made through a physical model. A study has been carried out considering several parameters (electrode geometry, voltage applied) in order to achieve an optimal electrostatic shutter in terms of closure and aperture ratio.

Related Topics
Physical Sciences and Engineering Chemistry Analytical Chemistry
Authors
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