Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
745152 | Sensors and Actuators B: Chemical | 2006 | 5 Pages |
Abstract
Electrostatic ion shutters are a key component in ion mobility spectrometry technology. Ion mobility spectrometry instruments may be miniaturized by using MEMS components. In this paper we present an ion shutter made in bulk silicon micromachining. An optimization of the shutter design is made through a physical model. A study has been carried out considering several parameters (electrode geometry, voltage applied) in order to achieve an optimal electrostatic shutter in terms of closure and aperture ratio.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
M. Salleras, A. Kalms, A. Krenkow, M. Kessler, J. Goebel, G. Müller, S. Marco,