Synthesis and H2 gas sensing properties of tin oxide nanohole arrays with various electrodes

Tin oxide nanohole arrays have been prepared by a liquid phase deposition method. Field emission-type scanning electron microscopy (FE-SEM) and X-ray diffraction (XRD) are used to characterize the surface morphologies and crystal structures of the tin oxide nanohole arrays. Two types of noble metal (Au, Pt, and Pd) electrodes covered with the surface of the tin oxide nanohole arrays, and the gas response of the sensors was measured to H2 balanced with air. Tin oxide nanohole array sensors exhibited reversible response to H2 in air. Temperature dependence of the gas response differed between the sensors equipped with a pair of electrodes on both surfaces and the sensors equipped with a couple of inter-digitated electrodes on one side. And H2 response of the sensors equipped with a pair of electrodes on both surfaces was much higher than that of the sensors equipped with inter-digitated electrodes on one side.