Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
746754 | Sensors and Actuators B: Chemical | 2007 | 5 Pages |
Abstract
We report the growth of ZnO nanowires on ZnO:Ga/glass templates and the fabrication of laterally grown ZnO nanowire ethanol sensors. It was found that growth direction of the nanowires depends strongly on growth parameters. It was also found that resistivity of the fabricated sensor decreased upon ethanol gas injection. By introducing 1500 ppm ethanol gas, it was found that the device response were around 20%, 35%, 58% and 61% when the gas sensor was operated at 180 °C, 230 °C, 260 °C and 300 °C, respectively. It was also found that the device response at 300 °C were around 18%, 26%, 43%, 55% and 61% when the concentration of injected ethanol gas was 50 ppm, 100 ppm, 500 ppm, 1000 ppm and 1500 ppm, respectively.
Related Topics
Physical Sciences and Engineering
Chemistry
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Authors
Ting-Jen Hsueh, Cheng-Liang Hsu, Shoou-Jinn Chang, I-Cherng Chen,