Article ID Journal Published Year Pages File Type
74846 Microporous and Mesoporous Materials 2009 6 Pages PDF
Abstract

A facile and efficient method in order to assemble zeolites for the purpose of generating zeolite nano-micropatterns on the Si wafer was investigated by using e-beam lithography. A monolayer of organized, fully covered and strongly bound zeolite A nanocrystals were formed on the Si wafer substrates without using any chemical linkers. The limits of forming nano sized zeolite A patterns on the Si wafer was tested and it was observed that zeolite A nanocrystals could be assembled on the Si wafers with high precision. The limit of the pattern resolution was defined by the size of the zeolite nanocrystal, which was around 250 nm in the current study. Furthermore, mono and double layers of zeolite A nanocrystals were generated without using any chemical linkers on the substrates for the first time.

Related Topics
Physical Sciences and Engineering Chemical Engineering Catalysis
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