ZSM-5 zeolite films on Si substrates grown by in situ seeding and secondary crystal growth and application in an electrochemical hydrocarbon gas sensor

ZSM-5 zeolite films were grown on Si substrates by a two-step hydrothermal synthesis consisting of in situ seeding and secondary crystal growth. The films were 8–13 μm thick and partly oriented with the c-axis perpendicular to the substrate surface. After ion exchange with sodium ions, one film was applied as solid electrolyte in a potentiometric hydrocarbon gas sensor. A fast and reversible voltage response of the sensor to varying propane concentrations (100 ppm – 10%) was observed in O2/CO2/N2 gas mixtures at 723 K.