Optical planar waveguides based on tungsten-tellurite glass fabricated by rf-sputtering

Planar waveguides based on tungsten-tellurite glasses doped with erbium and ytterbium ions are created. Planar structures with a superimposed strip based on tungsten tellurite glasses were formed by methods of Radio Frequency Magnetron Sputtering and lithography. Waveguide operation up to 1.53 mkm was observed. Optical losses at a wavelength of 1.53 mkm in the test channel waveguides with a width of 15 μm are ~ 0.44 dB/cm. The dependence of the optical signal enhancement at a wavelength of 1.53 mkm on the pump power was investigated for different lengths of waveguide.