| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7903813 | Journal of Non-Crystalline Solids | 2013 | 4 Pages |
Abstract
⺠Amorphous germanium carbon films were fabricated by reactive sputtering and co-sputtering. ⺠Deposition rate, optical properties and chemical bonding were investigated. ⺠The co-sputtering fabrication process is more favorable to form the GeC bonds than reactive sputtering. ⺠Formation of GeC bonds was promoted by high energy C sputtered from graphite target.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Xing-Sen Che, Zheng-Tang Liu, Yang-Ping Li, Ning Wang,