Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7903824 | Journal of Non-Crystalline Solids | 2013 | 7 Pages |
Abstract
⺠a-C:H films were synthesized by middle frequency pulsed unbalanced magnetron sputtering technique. ⺠Working pressure plays an important role in the microstructure and properties of the a-C:H films. ⺠The AES depth profile exhibited that the transitional layer width decreases with increasing working pressure. ⺠a-C:H films exhibit quite higher transmission in near IR region. ⺠a-C:H films can resist rain erosion.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Haiyang Dai, Jing Chen, Renzhong Xue, Tao Li, Zhenping Chen,