Article ID Journal Published Year Pages File Type
7903824 Journal of Non-Crystalline Solids 2013 7 Pages PDF
Abstract
► a-C:H films were synthesized by middle frequency pulsed unbalanced magnetron sputtering technique. ► Working pressure plays an important role in the microstructure and properties of the a-C:H films. ► The AES depth profile exhibited that the transitional layer width decreases with increasing working pressure. ► a-C:H films exhibit quite higher transmission in near IR region. ► a-C:H films can resist rain erosion.
Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
Authors
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