Article ID Journal Published Year Pages File Type
7904083 Journal of Non-Crystalline Solids 2013 6 Pages PDF
Abstract
► GaAs films with high dose of Ti incorporated have been obtained by R.F. sputtering. ► The evolution of Ga molar fraction suggests a possible substitution of Ga by Ti. ► XRD measurements reveal the presence of a new phase structure. ► The XPS measurement only reveals Tiδ + species. ► The presence of Ti affects the Etauc trend depending on the deposition conditions.
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Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
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