| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7904158 | Journal of Non-Crystalline Solids | 2013 | 4 Pages |
Abstract
⺠We show a new deposition process for triple materials for RF reactive RF magnetron sputtering. ⺠Produced materials are Aluminum Zinc Oxide (AZO). ⺠These materials were characterized by XRD, AFM, FESEM, UV-Visible and interferometry.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Saliha Elmas, Åadan Korkmaz,