Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7907628 | Optical Materials | 2018 | 7 Pages |
Abstract
The HfO2 thin films prepared by ion beam sputtering are thinned after heat treatment. The optical constants of the thin films were obtained by inversion of the ellipsometric parameters. The crystal structure of the films was characterized by X-ray diffractometer. The results show that the correlation coefficient between the refractive index and the grain size is more than 90%. The refractive index increases with the increase of the grain size. The physical mechanism of the refractive index inhomogeneity in the film thickness direction is crystallization of thin films.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Huasong Liu, Lishuan Wang, Shida Li, Yugang Jiang, Dandan Liu, Xiao Yang, Yiqin Ji, Feng Zhang, Deying Chen,