MoS2-Sb2O3 film exhibiting better oxidation-resistance in atomic oxygen environment

The microstructure and wear resistance of sputtered MoS2 films can be improved by adding some amount of metals. However, the oxidation-resistance of MoS2-metals films would be worried because some metals are sensitive to atomic oxygen (AO). In this paper, the inert Sb2O3 was introduced into the MoS2 film, and its effect on the structure and anti-oxidation ability of the MoS2 film was clarified. XRD and SEM results revealed that due to the addition of Sb2O3, the growth of MoS2 micro-platelets was almost suppressed, and so the composite film was amorphous and very compact. XPS analysis indicated that for the composite film, the influence by the AO irradiation was restricted into the film surface layer. Namely, the composite film exhibited a better anti-oxidation ability in the AO environment.