| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030637 | Surface and Coatings Technology | 2012 | 5 Pages |
Abstract
⺠Acetylene is strongly depleted in a magnetically enhanced hollow cathode arc plasma. ⺠Dissociation and polymerization products have been detected by mass spectrometry. ⺠Amorphous hydrogenated carbon films have been grown with rates up to 1 μm/min. ⺠The film with maximum hardness of 18.2 GPa shows dense morphology in the SEM picture. ⺠The film composition has been examined by elastic recoil detection analysis.
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Nanotechnology
Authors
Burkhard Zimmermann, Fred Fietzke, Heidrun Klostermann, Jan Lehmann, Frans Munnik, Wolfhard Möller,