Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8035209 | Thin Solid Films | 2014 | 4 Pages |
Abstract
The 2-MeV electron radiation damage of silicon-carbon source/drain (S/D) n-type metal oxide semiconductor field effect transistors with different carbon (C) concentrations is studied. Before irradiation, an enhancement of the electron mobility with C concentration of the S/D stressors is clearly observed. On the other hand, after electron irradiation, both the threshold voltage shift and the maximum electron mobility degradation are independent on the C concentration for all electron fluences studied. These results indicate that the strain induced electron mobility enhancement due to the C doping is retained after irradiation in the studied devices.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Toshiyuki Nakashima, Yuki Asai, Masato Hori, Masashi Yoneoka, Isao Tsunoda, Kenichiro Takakura, Mireia Bargallo Gonzalez, Eddy Simoen, Cor Claeys, Kenji Yoshino,