Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8035382 | Thin Solid Films | 2014 | 6 Pages |
Abstract
Thin (30-40 nm) and highly uniform Al2O3 coatings have been deposited at relatively low temperature of 100 °C onto various polymeric materials employing the atomic layer deposition (ALD) technique, both batch and roll-to-roll (R2R) mode. The applications for ALD have long been limited those feasible for batch processing. The work demonstrates that R2R ALD can deposit thin films with properties that are comparable to the film properties fabricated by in batch. This accelerates considerably the commercialization of many products, such as flexible, printed electronics, organic light-emitting diode lighting, third generation thin film photovoltaic devices, high energy density thin film batteries, smart textiles, organic sensors, organic/recyclable packaging materials, and flexible displays, to name a few.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Terhi Hirvikorpi, Risto Laine, Mika Vähä-Nissi, Väinö Kilpi, Erkki Salo, Wei-Min Li, Sven Lindfors, Jari Vartiainen, Eija Kenttä, Juha Nikkola, Ali Harlin, Juhana Kostamo,