Article ID Journal Published Year Pages File Type
8045368 Vacuum 2013 7 Pages PDF
Abstract
► Elimination of arcing at the target surface during reactive sputtering. ► High-rate reactive sputtering of oxide coatings. ► Nanocomposite coatings thermally stable above 1000 °C. ► Hard nanocomposite coatings with enhanced toughness.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Preview
High-rate pulsed reactive magnetron sputtering of oxide nanocomposite coatings
Authors
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