Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8148313 | Current Applied Physics | 2018 | 7 Pages |
Abstract
The mechanism of drift effect in pH-sensitive silicon nanowire (SiNW) ion sensitive field effect transistor (ISFET) is comprehensively studied by measuring the time-dependent drain current (ID) and the gate capacitance (CG) under different liquid-gate biases (VLGs) and pH levels. It was revealed that the origin of the current drift can be divided into three different mechanisms; the bulk ionic diffusion in sensing insulator, the chemical modification of insulator surface, and the oxide etch process induced by hydroxide (OHâ) ion. Based on the VLG/pH dependency of current drift and the transient CG variation, it is clearly recognized that the drift of n-type SiNW (n-SiNW) ISFET results from H+ diffusion in the insulator, whereas that of p-type SiNW (p-SiNW) ISFET is caused by temporal chemical modification (hydration) of the insulator, along with the oxide thickness (tox) reduction by OHâ ions.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Sihyun Kim, Dae Woong Kwon, Sangwan Kim, Ryoongbin Lee, Tae-Hyeon Kim, Hyun-Sun Mo, Dae Hwan Kim, Byung-Gook Park,