Article ID Journal Published Year Pages File Type
815347 Rare Metal Materials and Engineering 2008 4 Pages PDF
Abstract

F-doped tin oxide (Sn:F) film was prepared by atmosphere pressure chemical vapor deposition (APCVD) on float glass using monobutyltin trichloride (C4H9SnCl3, MBTC) and trifluoro acetic acid (CF3COOH, TFA) as the precursor and dopant, respectively. H2O with different concentrations was used as the activator. The prepared films were characterized by means of XRD, SEM, and UV-VIS-NIR spectroscopy. Experimental results reveal that the structures and properties of the films are greatly affected by the H2O content. H2O in a certain range of concentrations will promote the formation of Sn:F film and improve the properties of the films.

Related Topics
Physical Sciences and Engineering Engineering Mechanics of Materials