Article ID Journal Published Year Pages File Type
8168565 Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2016 5 Pages PDF
Abstract
Aiming at low energy X-ray imaging, a prototype chip based on Double-SOI process was designed and tested. The sensor and pixel circuit were characterized. The long lasting crosstalk issue in SOI technology was understood. The operation of pixel was verified with a pulsed infrared laser beam. The depletion of sensor revealed by signal amplitudes is consistent with the one revealed by I-V curve. An s-curve fitting resulted in a sigma of 153 e− among which equivalent noise charge (ENC) contributed 113 e−. It's the first time that the crosstalk issue in SOI technology was solved and a counting type SOI pixel demonstrated the detection of low energy radiation quantitatively.
Keywords
Related Topics
Physical Sciences and Engineering Physics and Astronomy Instrumentation
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