The optimization of SF6 decomposition process using an electron beam

This study was carried out to apply the decomposition process of SF6 using an electron beam to the actual field by optimizing the process. To do this, we selected Inconel 625, which has excellent corrosion resistance and durability, as an optimal reactor film to prevent damage from by-products (Hydrogen fluoride). Among additive gases, H2 gas was used to enhance the removal efficiency (RE) of SF6 because it has the greatest contribution to the RE. Additionally, the initial concentrations of SF6, the currents, and the flow rates, considered the main optimal factors, were 1%, 15 mA, and 10 L/min, respectively. Based on the above experimental results, the long-term operating test was performed for 3.5 h at 10 L/min and for 8 h at 5 L/min. The removal efficiency of SF6 was constantly maintained at approximately 80% at a flow rate 10 L/min. On the other hand, when the flow rate was adjusted to 5 L/min, the RE continuously remained at a level of about 90%.